Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy

نویسندگان

  • S. Nashima
  • O. Morikawa
  • K. Takata
  • M. Hangyo
چکیده

Optical properties of doped silicon wafers have been measured by means of terahertz time domain reflection spectroscopy. A method is proposed to obtain the relative phase by reflection accurately. By using this method, the relative phase is obtained within an error of less than 10 mrad at 1 THz. The experimentally obtained complex conductivity of relatively high-doped silicon (r 50.136 V cm) in the terahertz region agrees with the simple Drude model. © 2001 American Institute of Physics. @DOI: 10.1063/1.1413498#

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تاریخ انتشار 2001